Sputter deposition technology as a materials engineering
نویسندگان
چکیده
منابع مشابه
Sputter deposition processes
Sputter deposition is a widely used technique to deposit thin films on substrates. The technique is based upon ion bombardment of a source material, the target. Ion bombardment results in a vapor due to a purely physical process, i.e. the sputtering of the target material. Hence, this technique is part of the class of physical vapor deposition techniques, which includes, for example, thermal ev...
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Sputter deposition processes, especially for sputtering from metal targets, are well investigated. For practical reasons, i.e. for industrial processes, energetic considerations for sputter deposition are useful in order to optimize the sputtering process. In particular, for substrates at floating conditions it is required to obtain energetic conditions during film growth that enables sufficien...
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The sputter erosion of arcing contacts is a very complex phenomenon, which is determined by the interaction between electromagnetic force, heat conduction and surface tension of liquid metal. A new model for evaluating the sputter erosion of electrodes is described in this paper, which is based on the electromagnetic forces against the molten pool, flowing velocity, kinetic energy and the surfa...
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Paper presents knowledge about types of test in area of materials properties of selected methods of rapid prototyping technologies. In today used rapid prototyping technologies for production of models and final parts are used materials in initial state as solid, liquid or powder material structure. In solid state are used various forms such as pellets, wire or laminates. Basic range materials ...
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We propose, as a challenge to the software engineering research community, a new view of software engineering as technology transition. In this view, the role of software engineering is to take the initial results of theorists and harden these results to the point where they are ready to be used in fielded, commercial systems. Current techniques for software verification, while adequate for ser...
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ژورنال
عنوان ژورنال: Bulletin of Materials Science
سال: 1993
ISSN: 0250-4707,0973-7669
DOI: 10.1007/bf02757660